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经营范围
发明名称
Kombinierter Polieraufschlämmungspender und Spülarm
摘要
申请公布号
DE69813678(T2)
申请公布日期
2004.04.08
申请号
DE19986013678T
申请日期
1998.06.23
申请人
APPLIED MATERIALS, INC.
发明人
DANIEL, KENNEDY;BORIS, FUKSSHIMOV;BELITSKY, VICTOR;BROWN, KYLE;OSTERHELD, TOM;BEELER, JEFF;ADDIEGO, GINETTO;FISHKIN, BORIS
分类号
B24B37/04;B24B53/007;B24B57/02;H01L21/304;(IPC1-7):B24B37/04
主分类号
B24B37/04
代理机构
代理人
主权项
地址
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