| 摘要 |
PROBLEM TO BE SOLVED: To enhance productivity while quality of a deposited film is kept excellent. SOLUTION: In the case of making the film 62 by casting a dope 42 formed by dissolving a polymer in a solvent on a casting band 59 traveling or being rotated, assuming that the total volume of foreign matter contained in the dope 42 is A and the total volume of foreign matter of≥5μm in size in the dope is B, the dope 42 is filtered with a hydrophobic filter 40 so that a volume occupation rate of foreign matter of≥5μm in size expressed by (B/A)×100 becomes <30% before being cast on the casting band 59. COPYRIGHT: (C)2004,JPO |
