发明名称 METHOD OF FABRICATING CAPILLARY DISCHARGE PLASMA DISPLAY PANEL USING LIFT-OFF PROCESS
摘要 A method for fabricating a PDP is disclosed. The method for fabricating a PDP comprising the steps of preparing first (11) and second panels (12) for connecting with each other, forming at least one electrode (13) on the first panel (11), forming a dielectric layer (17) of PbO on the first panel (11), sequentially forming Cr and Ni on the PbO layer (17) as a mask material of the PbO layer (17), performing photolithography and lift-off processes on the Ni/Cr layers to form a mask pattern of Ni/Cr, and etching the PbO layer (17) using the mask pattern of Ni/Cr to form at least one capillary tube (18) within the PbO layer (17) to expose the electrode (13).
申请公布号 WO02071433(A3) 申请公布日期 2004.04.08
申请号 WO2001US43070 申请日期 2001.11.13
申请人 PLASMION DISPLAYS, LLC;KIM, STEVEN;YEOM, GEUN, YOUNG;LEE, YOUNG-JOON 发明人 KIM, STEVEN;YEOM, GEUN, YOUNG;LEE, YOUNG-JOON
分类号 H01J9/02;H01J11/12;H01J11/38 主分类号 H01J9/02
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