| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a wavefront aberration correction mirror for fixing an adhesive layer thickness and forming an adhesive layer thin. <P>SOLUTION: In the manufacturing method for the wavefront aberration correction mirror for correcting aberration by displacing the mirror surface of a mirror substrate by a piezoelectric element, when the mirror substrate is adhered to the piezoelectric element, an adhesive material (10) is spread to a fixed thickness by a squeegee method and transferred to the mirror substrate (6) or the piezoelectric element by a stamper (15). <P>COPYRIGHT: (C)2004,JPO |
