| 摘要 |
PROBLEM TO BE SOLVED: To provide an economical clean room having a local molecular contamination reduction area. SOLUTION: In this clean room, a molecular contamination removal air conditioner 64 is provided inside a machine room, and the local molecular contamination reduction area 66 into which air of a low molecular contamination level is sent from the air conditioner is provided inside a room body. The contamination reduction area extending into the room body in free arrangement and shape as a working area of the 0.1μm class 1, and is isolated from a maintenance area 70 by a partition wall 71. A supply chamber 82 connected to the air conditioner through a duct 80 is provided on a system ceiling 22 of the reduction area, and a return chamber 92 connected to the air conditioner through a duct 90 is provided in a lower part of the contamination reduction area. A dumper 88 and a dumper 94 are provided to keep an air pressure inside the contamination reduction area a positive pressure. COPYRIGHT: (C)2004,JPO
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