| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device for a semiconductor type pressure sensor capable of reducing procedures and labor of an inspection work, shortening an inspection time and reducing manufacturing and operation cost by simplifying the inspection device. SOLUTION: The inspection device is provided with a pressurization vessel allowing to be sealingly closed and opened and storing an article to be inspected; a probe installed in the pressurization vessel making an electric contact conduction with the article to be inspected; a retaining part installed in the pressurization vessel and retaining the article to be inspected; a pressurization part for pressurizing the inside of the pressurization vessel; a measuring part for simultaneously measuring a position of the probe and the article to be inspected in the pressurization vessel; an operation processing part for processing a signal obtained through the probe; and a position adjustment mechanism having a function for adjusting a relative position relationship of the probe and the retaining part. The article to be inspected can be measured and inspected at two different pressures in the pressurization vessel. COPYRIGHT: (C)2004,JPO
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