发明名称 Method of forming a semiconductor package
摘要 A semiconductor package production method containing a step in which a bond layer made of a single-layer film thermoset bond is provided on the back of a wafer on which many semiconductor devices are formed, a dicing tape is pasted onto its bond layer side, and the bond layer and the wafer are diced simultaneously in order to obtain semiconductor devices with the bond layer, and a step in which the semiconductor devices with the bond layer are detached from the dicing tape and die-attached to interposing substrates serving as bodies to which they are bonded; wherein, the aforementioned film thermoset bond contains an epoxy resin, an epoxy resin hardener, and a phenoxy resin as well as 50-80 wt % of spherical silica, and the bond layer is 100 mum or thicker. A semiconductor device made by this method and a wafer for use with this method.
申请公布号 US6716674(B2) 申请公布日期 2004.04.06
申请号 US20010952038 申请日期 2001.09.11
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 YAJIMA KIYOSHI;MASUMOTO MUTSUMI;HATANO CHIHIRO;NISHIO KIMITAKA;KIRIKAE NORIYUKI
分类号 C09J11/04;C09J163/00;C09J171/10;C09J201/00;H01L21/301;H01L21/44;H01L21/52;H01L21/58;H01L21/68;H01L21/78;H01L23/29;H01L23/48;(IPC1-7):H01L21/44 主分类号 C09J11/04
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