发明名称 MFMOS capacitors with high dielectric constant materials
摘要 A MFMOS one transistor memory structure for ferroelectric non-volatile memory devices includes a high dielectric constant material such as ZrO2, HfO2, Y2O3, or La2O3, or the like, or mixtures thereof, to reduce the operation voltage and to increase the memory window and reliability of the device.
申请公布号 US6716645(B2) 申请公布日期 2004.04.06
申请号 US20020319314 申请日期 2002.12.12
申请人 SHARP LABORATORIES OF AMERICA, INC. 发明人 LI TINGKAI;HSU SHENG TENG;YING HONG;ULRICH BRUCE D.;MA YANJUN
分类号 H01L21/8247;H01L21/28;H01L21/8246;H01L27/105;H01L29/51;H01L29/78;H01L29/788;H01L29/792;(IPC1-7):H01L21/00 主分类号 H01L21/8247
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