发明名称 Vaporizer
摘要 A vaporizer comprises disks each including an aperture at a central portion thereof. A hollow pipe having apertures for permitting radial outflow of a liquid extends through the aperture of each of the discs so as to form a stack of the discs. A resilient member applies a biasing force to the discs, and structure applies a force, via fluid control, against the biasing force to thereby remove the biasing force from the discs. Liquid in the hollow pipe is adapted to be delivered from the apertures to spaces between the discs and vaporized in the spaces between the discs.
申请公布号 US6715507(B2) 申请公布日期 2004.04.06
申请号 US20030364357 申请日期 2003.02.12
申请人 MKS JAPAN, INC. 发明人 ARAI MAYUMI;YAMAZAKI YOSHIYUKI
分类号 B01J7/00;B08B9/02;(IPC1-7):F16K51/00;F16K49/00;B08B9/032 主分类号 B01J7/00
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