| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a liquid jet head capable of making each of a piezoelectric body and a diaphragm in a thin film, precisely making a liquid passage and a piezoelectric element of a nozzle structure and a pressurizing chamber, and facilitating making of multi-nozzles and to provide the liquid jet head of which the ejection of a liquid drop can be precisely controlled. SOLUTION: The diaphragm 5 is formed on the piezoelectric body 4 by lamination or coating and a liquid passage pattern forming the pressurizing chamber 1 or a liquid supply passage is formed on the diaphragm 5 by a soluble resin. An overcoat resin including an epoxy resin which is solid at ordinary temperature, is dissolved in a solvent to be applied on a soluble pattern resin layer to form an overcoat resin layer 13 including a partition wall 1a for partitioning the pressurizing chamber 1, and then a liquid ejection nozzle 2 is formed on the overcoat resin layer 13. After that, the soluble pattern resin layer is dissolved to perform the patterning so as to correlate the piezoelectric body 4 with the pressurizing chamber 1, and then the liquid jet head is produced. COPYRIGHT: (C)2004,JPO
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