| 摘要 |
PROBLEM TO BE SOLVED: To accurately measure the position information of a part to be measured, such as, a mark, etc. even when light having a wide wavelength region is used. SOLUTION: The position information of the part WM to be measured is measured by using a signal relating to the part WM to be measured obtained by irradiating the part WM with a sensing beam. An apparatus for measuring the position includes detecting means 58, 66 each for detecting the part WM to be measured at each of a plurality of wavelength regions by irradiating the part WM with the beam, a selecting means 24 for selecting the wavelength region based on a symmetry of each of the signals detected at each of the plurality of the wavelength regions, and a measuring means 24 for measuring the position information of the part WM by using the signal having the selected wavelength region. COPYRIGHT: (C)2004,JPO
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