HEATER FOR PRODUCING CRYSTAL, AND APPARATUS FOR AND METHOD OF PRODUCING CRYSTAL

摘要

PROBLEM TO BE SOLVED: To solve such problems that a temperature in a raw material melt becomes nonuniform by the shape deformation of the exothermic part of a heater used for crystal production, single crystallization is inhibited and is not stabilized in quality. SOLUTION: The objective heater for use in the production of crystal by the Czochralski method is provided with at least a terminal to which an electric current is supplied and an exothermic part by resistance heating, and is arranged so as to surround a crucible housing the raw material melt. The heater has a uniform exothermic heat distribution with respect to the raw material melt after the shape deformation of the heater during the use in crystal production. COPYRIGHT: (C)2004,JPO