FILM-LIKE LAMINATE AND FLEXIBLE CIRCUIT SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a film-like laminate which can obtain a fine pattern and which has excellent electrical reliability. SOLUTION: The film-like laminate is constituted by sequentially forming a plasma chemical vapor deposition layer of an organic metal compound and a conductor layer on at least one side surface of a heat resistant polymer film. COPYRIGHT: (C)2004,JPO