| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical device for observing a reflected image and a transmitted image by a simple configuration, and further provide an image measuring device and an inspection device using the optical device. SOLUTION: The inspection device comprises an incident light source 11, a condenser lens 12 and a half mirror 13 to guide the light from the light source to an object. The light split by the half mirror 13 is reflected in a direction of an FPD 1. The light is condensed by an imaging lens 14, and incident on the FPD 1. A retroreflective sheet 23 is provided on a back side of the FPD 1. The reflected light by the FPD 1 is incident on a CCD camera 15. The light transmitted from the FPD1 is reflected by the retroreflective sheet 23 and incident on the CCD camera 15. COPYRIGHT: (C)2004,JPO
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