发明名称 Semiconductor device and method of manufacturing the same
摘要 A semiconductor device comprises a semiconductor substrate having semiconductor elements integrally formed therein, a wiring layer formed on the surface of the semiconductor substrate, and a conductive connecting plug formed in a through-hole extending through the semiconductor substrate, wherein the connecting plug has a region whose cross section parallel to the upper surface of the semiconductor substrate has an area smaller than the area of each of upper and lower surfaces of the connecting plug.
申请公布号 US2004061238(A1) 申请公布日期 2004.04.01
申请号 US20020322590 申请日期 2002.12.19
申请人 TOKYO SHIBAURA ELECTRIC CO 发明人 SEKINE MAKOTO
分类号 H01L21/3065;H01L21/28;H01L21/3205;H01L21/768;H01L23/48;H01L23/52;H01L25/065;H01L25/07;H01L25/18;(IPC1-7):H01L23/52 主分类号 H01L21/3065
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