VERFAHREN FÜR DIE HERSTELLUNG EINES HALBLEITERSUBSTRATES,申请号DE19946032604T-传众专利搜索

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发明名称	VERFAHREN FÜR DIE HERSTELLUNG EINES HALBLEITERSUBSTRATES
摘要
申请公布号	DE69432604(T2)	申请公布日期	2004.04.01
申请号	DE19946032604T	申请日期	1994.12.28
申请人	NIPPON STEEL CORP., TOKIO/TOKYO	发明人	TACHIMORI, MASAHARU;YANO, TAKAYUKI;HAMAGUCHI, ISAO;NAKAJIMA, TATSUO
分类号	H01L21/76;H01L21/02;H01L21/265;H01L27/12;(IPC1-7):H01L21/76;H01J37/317	主分类号	H01L21/76
代理机构		代理人
主权项
地址

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