Fiber optic wafer probe for measuring the parameters of photodetectors and other optoelectronic devices in situ on a wafer, whereby the probe has a probe body with a tip from which an optical fiber extends towards a test object

摘要

Fiber optic probe comprises a probe body with a tip that is selectively brought up to a device to be tested and an elongated optical fiber that extends along the body of the probe and projects beyond its tip. The size of the probe body is such that the optical fiber is held within the body so that is not free to move. Independent claims are also included for a number of fiber optic probe adaptations.