PIEZOELECTRIC RESONATOR, PIEZOELECTRIC FILTER, AND COMMUNICATION APPARATUS, CONCERNED WITH IMPROVING STABILITY OF OPERATION BY USING HEAT DISSIPATING FILM LOCATED OVER ONE OF UPPER ELECTRODE AND THIN FILM

摘要

PURPOSE: A piezoelectric resonator, piezoelectric filter, and communication apparatus are provided to avoid degradation in resonance characteristics and improve stability of operation by preventing unnecessary vibration and improving greatly heat dissipation and power endurance. CONSTITUTION: A piezoelectric resonator includes a substrate and a vibrating part. The substrate(10) includes one of an opening and a concavity. The vibrating part(11b) includes at least one pair of an upper electrode(16) and a lower electrode(14) which oppose each other in order to sandwich an upper surface and a lower surface of a thin film having at least one layer of a piezoelectric thin film(15). The vibrating part is disposed over the one of the opening and the concavity. The piezoelectric resonator further includes a heat dissipating film(18) which is located over at least one of the upper electrode and the thin film in order not to cover the vibrating part.