发明名称 |
Lithographic apparatus and device manufacturing method |
摘要 |
A linear seal seals over a slot formed in a wall of a vacuum chamber of a lithographic projection apparatus. The linear seal includes an elongate sealing member which is locally displaced from the slot at a selectable position such that conduits may pass from outside of the vacuum chamber to the inside of the vacuum chamber at the local displacement of the elongate sealing member.
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申请公布号 |
US2004061844(A1) |
申请公布日期 |
2004.04.01 |
申请号 |
US20030458727 |
申请日期 |
2003.06.11 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
VOSTERS PETRUS MATTHIJS HENRICUS;JACOBS HERNES;VAN DER SCHOOT HARMEN KLAAS;RUTGERS PETER |
分类号 |
H01L21/027;G03F7/20;(IPC1-7):G03B27/58;G03B27/42 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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