Tool having a plurality of electrodes and corresponding method of altering a very small surface

摘要

A micro-tool and corresponding method are disclosed herein for working a very small surface of a substrate. The micro-tool has a tip of diameter on the order of 1 mm or less for placement in close proximity to a location on a substrate to be worked, and at least two open electrodes located near an end of the tip, such that the gap between the open electrodes is on the order of a few microns or less. The micro-tool further includes a housing which holds the tip and wiring extending from the open electrodes to permit connection to a voltage source. When the electrodes of the micro-tool are connected by such wiring to a voltage, an electric field and electron emission arises between the open electrodes such that electron emission currents are established. In the corresponding method, a localized electric field is generated in close proximity to a substrate using a tool having at least two open electrodes with a gap between them on the order of a few microns or less, by applying a voltage to the open electrodes. The localized electric field and emitted electrons aid in at least one of etching and depositing a feature on the substrate surface.