发明名称 METHOD AND APPARATUSOF TRANSFERRING A SUBSTANTIALLY DISC-SHAPED WORKPIECE
摘要 Consistent with an embodiment of the present invention, there is a device for transferring a substantially disc-shaped workpiece from a workpiece carrier. The workpiece is fastened along a first one of its main surfaces with a double-side adhesive foil onto a carrier foil. The workpiece is fastened onto the carrier foil along a first one of the its main surfaces with a double-sided adhesive foil onto a carrier foil on whose surface the workpiece is to be provided and fastened along the first main surface in an at least substantially planar manner. The first double-sided adhesive foil is adhesively connected by a first adhesive layer provided on its first surface to a first surface of the workpiece carrier and by a second adhesive layer provided on it second surface to the workpiece alone the first main surface thereof.
申请公布号 EP1402571(A2) 申请公布日期 2004.03.31
申请号 EP20020735851 申请日期 2002.06.13
申请人 KONINKLIJKE PHILIPS ELECTRONICS N.V.;PHILIPS INTELLECTUAL PROPERTY & STANDARDS GMBH 发明人 ANKER, JOACHIM
分类号 H01L21/683;H01L21/00;H01L21/301;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/683
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