发明名称 |
METHOD AND APPARATUSOF TRANSFERRING A SUBSTANTIALLY DISC-SHAPED WORKPIECE |
摘要 |
Consistent with an embodiment of the present invention, there is a device for transferring a substantially disc-shaped workpiece from a workpiece carrier. The workpiece is fastened along a first one of its main surfaces with a double-side adhesive foil onto a carrier foil. The workpiece is fastened onto the carrier foil along a first one of the its main surfaces with a double-sided adhesive foil onto a carrier foil on whose surface the workpiece is to be provided and fastened along the first main surface in an at least substantially planar manner. The first double-sided adhesive foil is adhesively connected by a first adhesive layer provided on its first surface to a first surface of the workpiece carrier and by a second adhesive layer provided on it second surface to the workpiece alone the first main surface thereof. |
申请公布号 |
EP1402571(A2) |
申请公布日期 |
2004.03.31 |
申请号 |
EP20020735851 |
申请日期 |
2002.06.13 |
申请人 |
KONINKLIJKE PHILIPS ELECTRONICS N.V.;PHILIPS INTELLECTUAL PROPERTY & STANDARDS GMBH |
发明人 |
ANKER, JOACHIM |
分类号 |
H01L21/683;H01L21/00;H01L21/301;H01L21/68;(IPC1-7):H01L21/68 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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