Flexible mems transducer and manufacturing method thereof, and flexible mems wireless microphone

摘要

A flexible micro-electromechanical system (MEMS) transducer includes a flexible substrate (100); membrane layer (220) deposited on the substrate and has raised part of a predetermined length; lower and upper electrode layers (230, 250) formed by from a conductive material; active layer (240) formed by depositing a piezo-polymer between the electrode; and connecting pads (271, 272) each connected to respective electrode layer. Independent claims are also included for: (a) manufacturing the above MEMS transducer by forming sacrificial layer on the substrate; depositing a membrane layer on the sacrificial layer by plasma enhanced chemical vapor deposition (PECVD), followed by patterning; depositing a lower electrode layer on the membrane layer and patterning the lower electrode; sequentially depositing an active layer and an upper electrode, and patterning them; forming a first connecting part to be connected to the lower electrode layer and a second connecting pad to be connected to the upper electrode layer; and removing the sacrificial layer; (b) a flexible wireless MEMS microphone comprising flexible substrate; a flexible MEMS transducer structure formed on the substrate by PECVD; an antenna printed on the substrate for communicating with an outside source; a wire and interface circuit embedded in the substrate to connect the flexible MEMS transducer and the antenna; a flexible battery layer connected to the substrate; and a Bluetooth (RTM) module layer.