Catadioptric reflective/reduction lens for mapping an image pattern transfers a picture of the pattern in an object plane into an image plane

摘要

First (16) and second (19) tilted mirrors (TM) tilt at first and second tilting angles respectively against an optical axis. In one of the TM, a ratio (Rsp) between a reflecting level (RL) for s-polarized light and an RL for p-polarized light is greater than one in an incidence angle area including the angle of tilt and the corresponding ratio in the other TM is less than one. An Independent claim is also included for a mirror for ultraviolet light with a mirror substrate and a reflex coating on the mirror substrate.