| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a ceramic heater capable of surely bringing a ceramic sheet 2 into intimate contact with a ceramic axis 3 and quickly performing a further tightening operation, when further tightening after winding the ceramic sheet 2 with a high melting-point metal made from more than one kind of metal among W, Mo and Re screen-printed thereon as a thermal resistance element 4. SOLUTION: In the method, after forming the resistance element 4 on one main face of an unbaked ceramic sheet, a ceramic coating layer covering the resistance element 4 is formed and wound around an outer periphery of the unbaked ceramic axis 3 with a face on which the coating layer is formed facing inward, and when integrally baking the whole, the ceramic sheet wound around the outer periphery of the ceramic axis 3 is brought into intimate contact with an outer peripheral surface of the ceramic axis 3 by rotating the ceramic sheet among three rollers. COPYRIGHT: (C)2004,JPO
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