| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical integrated device wherein the materials constituting active layers of the respective optical elements are different from each other but the active layer-including mesa stripes are uniform in width, and to provide a method for manufacturing the same. SOLUTION: A stripe mask 32 having mask widths set for the regions, respectively, according to the etching rates determined, respectively, for the SCH-MQ active layer of a DFB (distributed feedback) laser region 10A and for the SCH-MQW absorption layer (active layer) of an EA optical modulator region 10B. COPYRIGHT: (C)2004,JPO
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