| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ceramic multilayer substrate having a cavity without a warp or strain. <P>SOLUTION: The ceramic multilayer substrate 101 includes a cavity 103 formed by laminating a cavity part 104 having a through hole formed for the cavity 103 on a flat plate 102. In the substrate, the plate 102 has a first ceramic layer 107 made of a first ceramic material, and a second ceramic layer 108 made of a second ceramic material having a different sintering temperature from the first material laminated on the first layer. The cavity part 104 has the first layer 107 made of the first ceramic material and the second layer 108 made of the second ceramic material having a different sintering temperature from the first material. The ceramic multilayer substrate is thus manufactured. <P>COPYRIGHT: (C)2004,JPO |
