| 摘要 |
PROBLEM TO BE SOLVED: To facilitate the movement of a workpiece 25 to each treatment chamber 3, 4 and 5 and the opening and closing of cut-off valves 9, 13 and 17, and to efficiently perform various treatments to the workpiece 25 by simple operation. SOLUTION: In the composite vacuum treatment system, the plurality of treatment chambers 3, 4, 5 and 6 provided with treatment means respectively performing prescribed treatment to the workpiece 25 are arranged in a longitudinal direction so as to be superimposed up and down. Partitions 7, 11 and 15 parting the upper and lower treatment chambers 3, 4, 5 and 6 are provided with communication ports 8, 12 and 16 in an upper and lower longitudinal direction. The cut-off valves 9, 13 and 17 opening and closing the communication ports 8, 12 and 16 by the operation from the outsides of the treatment chambers 3, 4, 5 and 6 are provided. At least treatment means 10 and 14 treating the workpiece 25 are provided on the cut-off valves 9 and 13. COPYRIGHT: (C)2004,JPO
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