| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an inspection device by which a series of processings including the picking up of the image of a large-area solar cell panel and the inspection of a film thickness by using a picked up image by using a device as inexpensive as possible. <P>SOLUTION: A solar cell panel color evenness inspection device 10 is provided with a carrying part 1a for carrying solar battery panels 13 and 15 obtained by laminating thin films 12 and 19 on a substrate 11, an image pickup control unit 6a for transmitting an image pickup request P based on velocities of the solar battery panels 13 and 15 carried by the carrying part 1a, an image pickup part 2a for generating a panel image PS by picking up images of the carried solar battery panels 13 and 15 based on the request for image pickup P from the control unit 6a, and a data generation part 7a for analyzing the panel image PS to generate film thickness data 1D to 9D' showing the thin films 12 and 19. The panel image shows film thicknesses of the thin films with color evenness, and film thickness data are generated by analyzing color evenness. <P>COPYRIGHT: (C)2004,JPO</p> |
