| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning device suitable for a charged particle beam exposure device. SOLUTION: The positioning device comprises first drive mechanisms (20 and 30) which position a first stage by driving in a plane of the first stage (60) and a second stage (70) configured on the first stage, and a second drive mechanism (150) which positions the second stage by adjusting the position and/or rotational angle of the second stage on the first stage. The second drive mechanism comprises a first electromagnet which generates a first attracting force based on a first control current, a second electromagnet which is provided to face the first electromagnet with an interval and generates a second attracting force based on a second control current, and a core material which is held movably between the first and second electromagnets and moves as attracted by the first and/or second attracting force. COPYRIGHT: (C)2004,JPO |
