| 摘要 |
PROBLEM TO BE SOLVED: To provide a marker of semiconductor wafers capable of forming uniform marks easily and stably and a semiconductor test device having the same. SOLUTION: A marker 120 of semiconductor wafers is constituted by having a liquid discharge head 126 discharging a marking liquid without making contact with the semiconductor wafer 200 and head controlling parts 123 and 125 controlling the operation of this liquid discharge head. COPYRIGHT: (C)2004,JPO
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