| 摘要 |
PROBLEM TO BE SOLVED: To supply a fine droplet to a minute space to make microprocessing possible, and to provide a method and an apparatus for forming the fine droplet therefor. SOLUTION: In the method and the apparatus for producing liquid fine particles, a liquid is atomized to produce atomized liquid particles which is subjected to inertia separation to sort the fine droplets. The droplets are brought into contact with a heated carrier gas to be thermally dried to produce further smaller particles. COPYRIGHT: (C)2004,JPO
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