发明名称 METHOD FOR MANUFACTURING IMAGE SENSOR HAVING LENS
摘要 PURPOSE: A method for manufacturing an image sensor having lens is provided to prevent particles and to reduce total module size by directly attaching a lens to the image sensor without forming an additional lens module. CONSTITUTION: A metal line, an insulating layer and a top metal film are sequentially deposited. The top metal film remains at a pixel array part, and a passivation layer is formed on the top metal film. After the passivation layer is selectively etched, a titanium film and a metal film(107) are sequentially formed on the exposed top metal film. A metal convex portion is formed on the metal film by electroplating. Then, the metal film(107) and the titanium film are removed. A lens(109) is formed to align a pixel array. The lens(109) is connected to an image sensor by using an aligning mark(110).
申请公布号 KR20040025218(A) 申请公布日期 2004.03.24
申请号 KR20020057071 申请日期 2002.09.18
申请人 HYNIX SEMICONDUCTOR INC. 发明人 BYUN, SEONG CHEOL
分类号 H01L27/14;H01L21/00;H01L21/20;H01L21/31;H01L21/82;H01L27/146;H04N1/028;H04N5/335;H04N5/374;(IPC1-7):H01L27/146 主分类号 H01L27/14
代理机构 代理人
主权项
地址