| 摘要 |
<p>The present invention is a system for protecting, for example, electroni c, mechanical, or other components from contamination in a processing environme nt and includes a distribution manifold, a pressurized fluid in fluid communication with the manifold, and a plurality of apparatuses, such as sensors, which are connected to the manifold by respective conduits throughwhich the pressurized fluid flows to maintain a positive pressure at each of the apparatuses to prevent the processing environment from contacting the plurality of apparatus.</p> |
