发明名称 Method of manufacturing a schottky device
摘要 An improved Schottky device, having a low resistivity layer of semiconductor material, a high resistivity layer of semiconductor material and a buried dopant region positioned in the high resistivity layer utilized to reduce reverse leakage current. The low resistivity layer can be an N<+ >material while the high resistivity layer can be an N<- >layer. The buried dopant region can be of P<+ >material, thus forming a PN junction with an associated charge depletion zone in the N<- >layer and an associated low reverse leakage current. The location of the P<+ >material allows for a full Schottky barrier between the N<- >material and a barrier metal to be maintained, thus the device experiences a low forward voltage drop.
申请公布号 US6710419(B2) 申请公布日期 2004.03.23
申请号 US20020233186 申请日期 2002.08.29
申请人 FABTECH, INC. 发明人 BUCHANAN WALTER R.;HAMERSKI ROMAN J.
分类号 H01L29/872;(IPC1-7):H01L27/095 主分类号 H01L29/872
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