Organic light emitting device with improved moisture seal

摘要

An electroluminescent device and method for making the same. The electroluminescent device includes a substrate that is impermeable to water and oxygen having a first electrode thereon. An electroluminescent layer is in electrical contact with the first electrode, and a second electrode is in electrical contact with the electroluminescent layer. A seal having layers of epoxy and alternating with layers of SiNH prevents water and oxygen from reaching the second electrode. The epoxy preferably has a cure temperature less than 140° C. Similarly, the silicon nitride layer is preferably deposited at a temperature below 140° C. The layer of SiNH preferably has an etch rate of less than 50 A/sec in 10% HF solution.