发明名称 Method and apparatus for generating periodic structures in substrates by synthetic wavelength holograph exposure
摘要 A substrate surface 10 having a photo-sensitive material surface thereon is simultaneously exposed to four plane waves of light at angles of incidence theta, -theta, phi and -phi subtending from the normal of the surface. The four plane waves create an interference pattern on the substrate so as to cause the formation of a periodic structure on the photo-sensitive material surface of the substrate.
申请公布号 US6709790(B1) 申请公布日期 2004.03.23
申请号 US19960581888 申请日期 1996.01.02
申请人 GOODRICH CORPORATION 发明人 GRATRIX EDWARD
分类号 G02B5/18;G03F7/20;(IPC1-7):G03H1/00 主分类号 G02B5/18
代理机构 代理人
主权项
地址
您可能感兴趣的专利