HEATER CAP BUSHING FOR FIXING HALOGEN HEATER OF SEMICONDUCTOR FABRICATION EQUIPMENT

摘要

PURPOSE: A heater cap bushing for fixing a halogen heater of semiconductor fabrication equipment is provided to prevent a separation phenomenon due to heat by forming the heater cap bushing with a heat-resistant material. CONSTITUTION: A heater cap bushing for fixing a halogen heater of semiconductor fabrication equipment includes the first opening portions(211), the second opening portions(212), the third opening portions, and a plurality of grooves(214) in order to fix a halogen heater arranged along a heating tank at both ends of a heating tank. The first opening portions(211) are arranged between an opposite side of both ends of the heating tank and the heating tank. The second diameter of the second opening portion(212) is smaller than the first diameter of the first opening portion. The third diameter of the third opening portion is smaller than the second diameter of the second opening portion. The grooves(214) are formed on upper portions and lower portions of the second opening portions.