SUBSTRATE CARRIER HAVING DOOR LATCHING AND SUBSTRATE CLAMPING MECHANISMS,申请号AU20030273251-传众专利搜索

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发明名称	SUBSTRATE CARRIER HAVING DOOR LATCHING AND SUBSTRATE CLAMPING MECHANISMS
摘要
申请公布号	AU2003273251(A1)	申请公布日期	2004.03.19
申请号	AU20030273251	申请日期	2003.08.28
申请人	APPLIED MATERIALS, INC.	发明人	ERIC, A. ENGLHARDT;MICHAEL RICE;MARTIN, R. ELLIOTT;ROBERT, B. LOWRANCE;JEFFREY, C. HUDGENS
分类号	H01L21/00;H01L21/677;(IPC1-7):H01L21/00	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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