| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo molecule pump capable of preventing a rise in impedance by shortening a cable between control circuits attached at respective apparatuses to be controlled and a power device in the turbo molecule pump and eliminating a thick line. SOLUTION: Respective spacers S and a stator ring 9 are laid out in a cylindrical form, and provided so as to have a certain clearance from an inner periphery surface of a casing 5 to form an area A. A flexible substrate 10 is inserted into the area A. Control circuit component parts for controlling a magnetic bearing 8 or the like are attached at the substrate 10, actually, the control circuit component parts are molded by resin to be disposed. The apparatus to be controlled on the magnetic bearing 8 side and the control circuit component parts on the substrate 10 are connected by a cable V1, and the control circuit component parts at the substrate 10 and the outside of the pump are connected through a cable V2. Therefore, the cables V1, V2 become shorter and a diameter becomes smaller, thus eliminating use of the power supply unit. COPYRIGHT: (C)2004,JPO
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