发明名称 Acoustic absorption radiation sensing in SiC
摘要 SiC at least about 400 micrometers thick, and preferably within the range of about 400-2,000 micrometers thick, is employed to detect electromagnetic radiation having a wavelength less than about 10 micrometers via an acoustic absorption mechanism. The SiC body preferably has a non-dopant impurity level low enough that it does not interfere with a single crystal structure for the SiC, and an approximately uniform thickness with an approximately flat radiation receiving surface.
申请公布号 US2004051042(A1) 申请公布日期 2004.03.18
申请号 US20030655904 申请日期 2003.09.05
申请人 HEETRONIX 发明人 PARSONS JAMES D.
分类号 G01J1/02;H01L25/00;H01L31/0248;H01L31/0256;H01L31/0312;H01L31/036;H01L31/09;(IPC1-7):G01J5/00 主分类号 G01J1/02
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