摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric element capable of obtaining a large generating force, and validating cost performance. SOLUTION: Two piezoelectric bimorphs 1a and 1b are overlapped, and a film layer 4 made of materials having low elastic coefficients and characteristics following up the displacement of opposite face directions on the surface and back faces is arranged between the overlaps so that a piezoelectric element 10 can be configured. Two upper and lower piezoelectric boards 2u and 2d are adhered to a piezoelectric bimorph, an electrode layer 3 is arranged between the adhesion, and anti-phase voltages are added to the upper and lower piezoelectric boards at the time of driving it. For example, when the upper piezoelectric board 2u is contracted and the lower piezoelectric board 2d is expanded, a free edge is bent upward as a whole, and when the direction of the voltage is changed, the free edge is bent downward on the contrary. A film layer 4 is formed of, for example, silicon system adhesive, and conductive materials such as carbon are added so that the film layer 4 can be made conductive. Thus, the film layer 4 is made to follow up the opposite displacement at the surface and back sides, and the film layer 4 is made conductive while any distorting operation is not suppressed. Thus, it is possible to provide an electrode. COPYRIGHT: (C)2004,JPO
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