| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for improving the heat stability of a polyparaxylylene derivative film and to obtain the polyparaxylylene derivative. SOLUTION: In forming the polyparaxylylene film represented by formula 1 (X1 and X2 are each hydrogen, a lower alkyl group or a halogen element; X1 and X2 may be the same or different) by a chemical vapor deposition method, a (2,2)-paracyclophane compound represented by formula 2 (X1 and X2 are as shown in the formula 1) and an amino(2,2)-paracyclophane compound represented by formula 3 (X3 is hydrogen or a lower alkyl group; Y1 and Y2 are each hydrogen or an amino group; Y1 and Y2 are not hydrogen at the same time) as raw materials are mixed and formed into a film. COPYRIGHT: (C)2004,JPO |
