| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning type microscope system which is not influenced by an error of a microscope-side unit whatever microscope it is combined with and in which optical adjustments of a scanning optical system are easily and securely achieved. SOLUTION: Laser light from a visible laser unit 8 is converged through an objective 5 to form a light spot on a sample 3, an optical scanning mirror 15 is deflected to scan the sample 3 with the light spot in a two-dimensional plane, and light from the sample 3 is detected by optical detectors 28a and 28b. Further, the system has a pupil projection lens 16 and an imaging lens 18 which are arranged in a specified positional relation in the optical path of the laser light so that the optical scanning unit 15 and the pupil position of the objective 5 are optically conjugate, those pupil projection lens 16 and imaging lens 18 being provided in one scanning block 6 together with the optical scanning mirror 15. COPYRIGHT: (C)2004,JPO
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