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发明名称
CVD REACTOR WITH EXHAUST RING MADE OF GRAPHITE
摘要
申请公布号
EP1397528(A2)
申请公布日期
2004.03.17
申请号
EP20010980228
申请日期
2001.08.01
申请人
AIXTRON AG
发明人
JUERGENSEN, HOLGER;STRAUCH, GERD;KAEPPELER, JOHANNES
分类号
C23C16/455;C23C16/44;C30B25/14;H01L21/205;(IPC1-7):C23C16/44
主分类号
C23C16/455
代理机构
代理人
主权项
地址
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