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发明名称
A SILICA-BASED SLURRY
摘要
申请公布号
EP1397452(A1)
申请公布日期
2004.03.17
申请号
EP20020739840
申请日期
2002.06.13
申请人
PPG INDUSTRIES OHIO, INC.
发明人
HELLRING, STUART, D.;MC CANN, COLIN, P.;KAHLE, CHARLES, F.;LI, YUZHUO;KELEHER, JASON
分类号
B24B37/00;C09G1/02;C09K3/14;H01L21/304;H01L21/321;(IPC1-7):C09G1/02;C09G1/04
主分类号
B24B37/00
代理机构
代理人
主权项
地址
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