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发明名称
ELLIPSOMETER MEASURING INSTRUMENT
摘要
申请公布号
EP1034413(B1)
申请公布日期
2004.03.17
申请号
EP19980948735
申请日期
1998.08.06
申请人
ROBERT BOSCH GMBH
发明人
HAHN, JUERGEN;KUEHNLE, GOETZ
分类号
G01B11/06;G01J4/00;(IPC1-7):G01B11/06
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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