| 摘要 |
Optical apparatus for measuring displacement of a moveable member so as to enable compact construction and high accuracy measurement includes an optical grid, a light source, a plurality of light receiving arrays, and an operating circuit. Also, each of the plurality of light receiving arrays has a plurality of light receiving elements arranged at a pitch S. The operating circuit calculates the displacement of the moveable member based on outputs from the plurality of light receiving arrays, which are arranged so that a predetermined distance in a direction of displacement shifts one from another.
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