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发明名称
PRÜFKOPF FÜR MIKROSTRUKTUREN MIT SCHNITTSTELLE
摘要
申请公布号
AT261129(T)
申请公布日期
2004.03.15
申请号
AT19980119385T
申请日期
1998.10.14
申请人
FEINMETALL GMBH
发明人
SCHMID, RAINER;GIRINGER, KLAUS;GAUSS,ULRICH;DEUSCH, HEINZ
分类号
G01R1/06;G01R1/073;H01L21/66;(IPC1-7):G01R1/073
主分类号
G01R1/06
代理机构
代理人
主权项
地址
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