| 发明名称 |
DIELECTRIC ELEMENT AND MANUFACTURING METHOD OF DIELECTRIC ELEMENT |
| 摘要 |
PROBLEM TO BE SOLVED: To provide a dielectric element having excellent ferroelectric characteristics. SOLUTION: The dielectric element comprises a lower electrode 4 terminating Pt (platinum atom) positioned on a surface 4a by F (fluorine atom), and a ferroelectric film 5 formed on the surface 4a terminated by F (fluorine atom) of the lower electrode 4. COPYRIGHT: (C)2004,JPO
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| 申请公布号 |
JP2004079607(A) |
申请公布日期 |
2004.03.11 |
| 申请号 |
JP20020234562 |
申请日期 |
2002.08.12 |
| 申请人 |
SANYO ELECTRIC CO LTD |
发明人 |
HONMA KAZUYA;MATSUSHITA SHIGEHARU |
| 分类号 |
H01L27/04;H01L21/02;H01L21/314;H01L21/316;H01L21/822;H01L21/8246;H01L27/105;(IPC1-7):H01L21/822 |
主分类号 |
H01L27/04 |
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