摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray tube capable of cooling its target and deflecting coil in good workmanship. SOLUTION: The X-ray tube is equipped with a cooling member 40 interposed between the deflecting coil 26 and a vacuum envelope 20 and connected thermally with the deflecting coil 26 and the target member 30. Cooling of the cooling member 40 cools the target member 30 and the deflecting coil 26, and the target member 30 can be maintained at the specified low temperature even if the target member 30 is irradiated with electron beams to allow reducing the damage of the target member 30, while the deflecting coil 26 can be maintained at the specified low temperature which causes the characteristics of the deflecting coil 26 to be unlikely to change. Interposing of the cooling member 40 between the deflecting coil 26 and the vacuum envelope 20 shuts the coil 26 from the envelope 20 in thermal terms, and the heat generated by the coil 26 is not substantially conducted to the envelope 20, and it is possible to reduce deterioration of the X-ray tube 10 and a variation in the characteristics. COPYRIGHT: (C)2004,JPO
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